@article{139620,
      recid = {139620},
      title = {Beam technologies for integrated processing : report of  the Committee on Beam Technologies: Opportunities in  Attaining Fully-Integrated Processing Systems, National  Materials Advisory Board, Commission on Engineering and  Technical Systems, National Research Council.},
      publisher = {National Academy Press,},
      address = {Washington, D.C. :},
      pages = {xii, 89 p. :},
      year = {1992},
      note = {"NMAB-461."},
      url = {http://library.usi.edu/record/139620},
}