TY  - BOOK
CN  - TK7836
CN  - TK7836
CY  - Washington, D.C. :
DA  - 1992.
ID  - 139620
KW  - Microelectronics industry.
KW  - Molecular beams
KW  - Microelectronics
KW  - Plasma-enhanced chemical vapor deposition
N1  - "NMAB-461."
PB  - National Academy Press,
PP  - Washington, D.C. :
PY  - 1992.
SN  - 0309046351
T1  - Beam technologies for integrated processing :report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
TI  - Beam technologies for integrated processing :report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
ER  -