@article{1399821,
      recid = {1399821},
      author = {Reinhardt, Karen A. and Reidy, Richard F.,},
      title = {Handbook of cleaning for semiconductor manufacturing :  fundamentals and applications /},
      publisher = {John Wiley & Sons, Inc.,},
      address = {Salem, Mass. ;},
      pages = {1 online resource (xxii, 590 pages ) :},
      year = {2011},
      url = {http://library.usi.edu/record/1399821},
}