TY  - GEN
AU  - Reinhardt, Karen A.
AU  - Reidy, Richard F.,
CN  - QC611.6.S9
CY  - Salem, Mass. ;
CY  - Scrivener ;
CY  - Hoboken, N.J. :
DA  - c2011.
ID  - 1399821
KW  - Semiconductors
KW  - Surface preparation.
LK  - https://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=700543
PB  - John Wiley & Sons, Inc.,
PP  - Salem, Mass. ;
PP  - Scrivener ;
PP  - Hoboken, N.J. :
PY  - c2011.
T1  - Handbook of cleaning for semiconductor manufacturing :fundamentals and applications /
TI  - Handbook of cleaning for semiconductor manufacturing :fundamentals and applications /
UR  - https://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=700543
ER  -