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001399821 020__ $$z0470625953
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001399821 020__ $$z9781118071731
001399821 020__ $$z9781118071748
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001399821 050_4 $$aQC611.6.S9$$bR456 2011
001399821 1001_ $$aReinhardt, Karen A.
001399821 24510 $$aHandbook of cleaning for semiconductor manufacturing :$$bfundamentals and applications /$$cKaren A. Reinhardt, Richard F. Reidy.
001399821 260__ $$aSalem, Mass. ;$$aScrivener ;$$aHoboken, N.J. :$$bJohn Wiley & Sons, Inc.,$$cc2011.
001399821 300__ $$a1 online resource (xxii, 590 pages ) :$$billustrations
001399821 336__ $$atext$$2rdacontent
001399821 337__ $$acomputer$$2rdamedia
001399821 338__ $$aonline resource$$2rdacarrier
001399821 504__ $$aIncludes bibliographical references and index.
001399821 506__ $$aAccess limited to authorized users.
001399821 650_0 $$aSemiconductors$$xSurfaces$$xCleaning.
001399821 650_0 $$aSurface preparation.
001399821 655_0 $$aElectronic books
001399821 7001_ $$aReidy, Richard F.,$$d1960-
001399821 852__ $$bebk
001399821 85640 $$3ProQuest Ebook Central Academic Complete $$uhttps://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=700543$$zOnline Access
001399821 909CO $$ooai:library.usi.edu:1399821$$pGLOBAL_SET
001399821 980__ $$aBIB
001399821 980__ $$aEBOOK
001399821 982__ $$aEbook
001399821 983__ $$aOnline