Handbook of cleaning for semiconductor manufacturing : fundamentals and applications / Karen A. Reinhardt, Richard F. Reidy.
2011
QC611.6.S9 R456 2011
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Title
Handbook of cleaning for semiconductor manufacturing : fundamentals and applications / Karen A. Reinhardt, Richard F. Reidy.
Author
ISBN
0470625953
1118071743
9780470625958
9781118071731
9781118071748
1118071743
9780470625958
9781118071731
9781118071748
Publication Details
Salem, Mass. ; Scrivener ; Hoboken, N.J. : John Wiley & Sons, Inc., c2011.
Language
English
Description
1 online resource (xxii, 590 pages ) : illustrations
Call Number
QC611.6.S9 R456 2011
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
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