TY  - GEN
AU  - Ryu, Yu Kyoung,
AU  - Martínez Rodrigo, Javier,
CN  - TK7888.4
DO  - 10.1201/9781003223610
DO  - doi
ID  - 1429330
KW  - Microlithography
KW  - Scanning probe microscopy
LK  - https://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=7121476
SN  - 9781003223610
SN  - 1003223613
SN  - 9781000804867
SN  - 1000804860
SN  - 9781000804911
SN  - 1000804917
T1  - Scanning probe lithography :fundamentals, materials, and applications /
TI  - Scanning probe lithography :fundamentals, materials, and applications /
UR  - https://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=7121476
ER  -