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001429330 020__ $$a9781003223610
001429330 020__ $$a1003223613
001429330 020__ $$a9781000804867
001429330 020__ $$a1000804860
001429330 020__ $$a9781000804911
001429330 020__ $$a1000804917
001429330 020__ $$z9781032122144
001429330 020__ $$z1032122145
001429330 020__ $$z9781032122151
001429330 020__ $$z1032122153
001429330 0247_ $$a10.1201/9781003223610$$2doi
001429330 040__ $$aNhCcYBP$$cNhCcYBP
001429330 050_4 $$aTK7888.4$$b.R98 2023
001429330 08204 $$a621.381531$$223
001429330 1001_ $$aRyu, Yu Kyoung,$$eauthor.
001429330 24510 $$aScanning probe lithography :$$bfundamentals, materials, and applications /$$cYu Kyoung Ryu and Javier Martinez Rodrigo.
001429330 264_1 $$aBoca Raton :$$bCRC Press,$$c2023.
001429330 300__ $$a1 online resource (1 volume) :$$billustrations
001429330 336__ $$atext$$btxt$$2rdacontent
001429330 337__ $$acomputer$$bc$$2rdamedia
001429330 338__ $$aonline resource$$bcr$$2rdacarrier
001429330 4900_ $$aEmerging materials and technologies
001429330 504__ $$aIncludes bibliographical references.
001429330 506__ $$aAccess limited to authorized users
001429330 533__ $$aElectronic reproduction.$$bAnn Arbor, MI$$nAvailable via World Wide Web.
001429330 588__ $$aDescription based on print version record.
001429330 650_0 $$aMicrolithography$$xIndustrial applications.
001429330 650_0 $$aScanning probe microscopy$$xIndustrial applications.
001429330 655_0 $$aElectronic books
001429330 7001_ $$aMartínez Rodrigo, Javier,$$eauthor.
001429330 7102_ $$aProQuest (Firm)
001429330 77608 $$iPrint version:$$aRyu, Yu Kyoung.$$tScanning probe lithography.$$dBoca Raton : CRC Press, 2022$$z9781032122144
001429330 852__ $$bebk
001429330 85640 $$3GOBI DDA$$uhttps://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=7121476$$zOnline Access
001429330 909CO $$ooai:library.usi.edu:1429330$$pGLOBAL_SET
001429330 980__ $$aBIB
001429330 980__ $$aEBOOK
001429330 982__ $$aEbook
001429330 983__ $$aOnline