Development and characterization of a dispersion-encoded method for low-coherence interferometry / Christopher Taudt.
Taudt, Christopher.
2022
QC411
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Title Development and characterization of a dispersion-encoded method for low-coherence interferometry / Christopher Taudt.
Author Taudt, Christopher.
ISBN 9783658359263 (electronic bk.)
3658359269 (electronic bk.)
3658359250
9783658359256
DOI https://doi.org/10.1007/978-3-658-35926-3
Publication Details Wiesbaden, Germany : Springer Vieweg, [2022]
Language English
Description 1 online resource
Item Number 10.1007/978-3-658-35926-3 doi
Call Number QC411
Dewey Decimal Classification 535/.470287
Summary This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 aem with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach. About the Author Christopher Taudt holds a diploma degree in Mechanical Engineering of the WH Zwickau. During a stay at the IT Sligo, Ireland, he earned a Bachelor Degree in Mechanical Engineering. After his studies, Christopher Taudt has worked on research projects in optical metrology and earned a PhD in optical metrology from the TU Dresden.
Bibliography, etc. Note Includes bibliographical references.
Access Note Open access.
Source of Description Online resource; title from PDF title page (SpringerLink, viewed December 6, 2021).
Available in Other Form Development and characterization of a dispersion-encoded method for low-coherence interferometry.
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1 Introduction and motivation
2 Related works and basic considerations
3 Surface profilometry
4 Polymer characterization
5 Thin-film characterization
6 Conclusion.

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