001433481 000__ 03641cam\a2200601\a\4500 001433481 001__ 1433481 001433481 003__ OCoLC 001433481 005__ 20230309003608.0 001433481 006__ m\\\\\o\\d\\\\\\\\ 001433481 007__ cr\un\nnnunnun 001433481 008__ 210116s2021\\\\sz\\\\\\o\\\\\000\0\eng\d 001433481 019__ $$a1230123407$$a1236329655$$a1238203625$$a1249945179 001433481 020__ $$a9783030638269$$q(electronic bk.) 001433481 020__ $$a303063826X$$q(electronic bk.) 001433481 020__ $$z3030638251 001433481 020__ $$z9783030638252 001433481 0247_ $$a10.1007/978-3-030-63826-9$$2doi 001433481 035__ $$aSP(OCoLC)1231609662 001433481 040__ $$aEBLCP$$beng$$epn$$cEBLCP$$dGW5XE$$dOCLCO$$dYDX$$dDCT$$dSFB$$dOCLCF$$dLEATE$$dUKAHL$$dOCLCQ$$dOCLCO$$dOCLCQ 001433481 049__ $$aISEA 001433481 050_4 $$aTA1570 001433481 08204 $$a621.36/2$$223 001433481 08204 $$a539.77 001433481 08204 $$a620.11295$$223 001433481 08204 $$a620.11297$$223 001433481 1001_ $$aMontero Álvarez, Daniel. 001433481 24510 $$aNear infrared detectors based on silicon supersaturated with transition metals /$$cDaniel Montero Álvarez. 001433481 260__ $$aCham :$$bSpringer,$$c2021. 001433481 300__ $$a1 online resource (262 pages) 001433481 336__ $$atext$$btxt$$2rdacontent 001433481 337__ $$acomputer$$bc$$2rdamedia 001433481 338__ $$aonline resource$$bcr$$2rdacarrier 001433481 347__ $$atext file 001433481 347__ $$bPDF 001433481 4901_ $$aSpringer Theses 001433481 500__ $$aDoctoral Thesis accepted by Universidad Complutense de Madrid, Madrid, Spain. 001433481 5050_ $$aIntroduction -- Experimental techniques -- Results: NLA using a short pulse duration KrF laser -- Results: NLA using a long pulse duration XeCl laser -- Results: Integrating the supersaturated material in a CMOS pixel matrix. 001433481 506__ $$aAccess limited to authorized users. 001433481 520__ $$aThis thesis makes a significant contribution to the development of cheaper Si-based Infrared detectors, operating at room temperature. In particular, the work is focused in the integration of the Ti supersaturated Si material into a CMOS Image Sensor route, the technology of choice for imaging nowadays due to its low-cost and high resolution. First, the material is fabricated using ion implantation of Ti atoms at high concentrations. Afterwards, the crystallinity is recovered by means of a pulsed laser process. The material is used to fabricate planar photodiodes, which are later characterized using current-voltage and quantum efficiency measurements. The prototypes showed improved sub-bandgap responsivity up to 0.45 eV at room temperature. The work is further supported by a collaboration with STMicroelectronics, where the supersaturated material was integrated into CMOS-based sensors at industry level. The results show that Ti supersaturated Si is compatible in terms of contamination, process integration and uniformity. The devices showed similar performance to non-implanted devices in the visible region. This fact leaves the door open for further integration of supersaturated materials into CMOS Image Sensors. 001433481 588__ $$aDescription based on print version record. 001433481 650_0 $$aInfrared detectors$$xMaterials. 001433481 650_0 $$aSilicon compounds. 001433481 650_6 $$aDétecteurs de rayonnement infrarouge$$xMatériaux. 001433481 650_6 $$aSilicium$$xComposés. 001433481 655_0 $$aElectronic books. 001433481 77608 $$iPrint version:$$aMontero Álvarez, Daniel$$tNear Infrared Detectors Based on Silicon Supersaturated with Transition Metals$$dCham : Springer International Publishing AG,c2021$$z9783030638252 001433481 830_0 $$aSpringer theses. 001433481 852__ $$bebk 001433481 85640 $$3Springer Nature$$uhttps://univsouthin.idm.oclc.org/login?url=https://link.springer.com/10.1007/978-3-030-63826-9$$zOnline Access$$91397441.1 001433481 909CO $$ooai:library.usi.edu:1433481$$pGLOBAL_SET 001433481 980__ $$aBIB 001433481 980__ $$aEBOOK 001433481 982__ $$aEbook 001433481 983__ $$aOnline 001433481 994__ $$a92$$bISE