Intro
Foreword
Preface
Acknowledgements
Abbreviations
Contents
About the Authors
Part I: Context and Overview
Chapter 1: The Opportunities and Challenges of MEMS Product Development
Why Are MEMS So Challenging?
Three-Dimensional Features Impede Process Flow Standardization
Complex Processes and Microscale Physics Impair Precise Simulation
MEMS Foundries Must Qualify each New Process Flow
Planning for Successful MEMS Product Development
Summary
References

Chapter 2: Economics of Semiconductor Device Manufacturing and Impacts on MEMS Product Development
Economics of Silicon Wafer Manufacturing
Parallel Fabrication Enables Economy of Scale
Large Product Volumes Defray the Huge Capital Cost of Wafer Fabs
Captive Fabs, Foundries, and the Fabless Model
How MEMS Production Differs from Semiconductor Production
MEMS Devices Are Physically Different from Electronic Semiconductor Devices
MEMS Lack Standard Processes
MEMS Products Have Lower Wafer Volumes per Process
Summary
References

Chapter 3: Stages of MEMS Product Development
The Five Stages to Commercialize a MEMS Product
Proof-of-Concept Prototype
Advanced Prototypes
Foundry Feasibility
Foundry Pilot Production Stage
Foundry Production
Funding and Schedule for the Five Stages
Typical Budget and Timeline for Stages of Development
Secure Continuous Funding for Efficient Product Development
Summary
References
Part II: Business Requirements for a Viable Product
Chapter 4: What Is the Product? Requirements Analysis
Understanding the Market

Market Perspective Frames Product Requirements Analysis
Technology Push
Market Pull
Which Parties Dictate the Product Requirements?
Understanding Technical Requirements
Functional Requirements
Environmental Requirements
Interface and Package Requirements
Calibration Requirements
Quality and Regulatory Requirements
Understanding Business Requirements
Unit Price Requirements
Overcoming Existing Barriers to Entry
Satisfying Intermediary Integrators
Arranging Security of Supply
Summary
References

Chapter 5: Is There a Business Opportunity? Product Unit Cost Modeling
Rough Order of Magnitude Unit Cost
Step 1: Calculate Number of Wafers Needed to Fabricate the Number of Units to be Sold in a Year
Step 2: Calculate ROM MEMS Die Unit Cost
Gain Insights from Parameter Sensitivity Analyses
Detailed Unit Cost Model
Step 1: Identify all Operations or Components of the Finished MEMS Product and Expected Yield for each
Step 2: Gather Cost Data for each Manufacturing Operation
Step 3: Assemble Model and Perform Parameter Sensitivity Analyses