@article{1435589,
      recid = {1435589},
      author = {Saxena, Shanky, and Sharma, Ritu, and Pant, B. D.,},
      title = {Design and development of MEMS based guided beam type  piezoelectric energy harvester /},
      pages = {1 online resource},
      abstract = {This book presents device design, layout design, FEM  analysis, device fabrication, and packaging and testing of  MEMS-based piezoelectric vibration energy harvesters. It  serves as a complete guide from design, FEM, and  fabrication to characterization. Each chapter of this  volume illustrates key insight technologies through images.  The book showcases different technologies for energy  harvesting and the importance of energy harvesting in  wireless sensor networks. The design, simulation, and  comparison of three types of structures single beam  cantilever structure, cantilever array structure, and  guided beam structure have also been reported in one of the  chapters. In this volume, an elaborate characterization of  two-beam and four-beam fabricated devices has been carried  out. This characterization includes structural, material,  morphological, topological, dynamic, and electrical  characterization of the device. The volume is very concise,  easy to understand, and contains colored images to  understand the details of each process.},
      url = {http://library.usi.edu/record/1435589},
      doi = {https://doi.org/10.1007/978-981-16-0606-9},
}