Handbook of laser micro- and nano-engineering / Koji Sugioka, editor
Sugioka, Kōji, editor.
2021
TA1715 .H36 2021
Available Online

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Title Handbook of laser micro- and nano-engineering / Koji Sugioka, editor
ISBN 9783030636470 (electronic book)
303063647X (electronic book)
9783030636463
3030636461
9783030636487
3030636488
DOI https://doi.org/10.1007/978-3-030-63647-0
Published Cham : Springer, [2021]
Copyright ©2021
Language English
Description 1 online resource (2085 pages) : illustrations (chiefly color)
Item Number 10.1007/978-3-030-63647-0 doi
Call Number TA1715 .H36 2021
Dewey Decimal Classification 621.36/6
Summary This handbook provides a comprehensive review of the entire field of laser micro and nano processing, including not only a detailed introduction to individual laser processing techniques but also the fundamentals of laser-matter interaction and lasers, optics, equipment, diagnostics, as well as monitoring and measurement techniques for laser processing. Consisting of 11 sections, each composed of 4 to 6 chapters written by leading experts in the relevant field. Each main part of the handbook is supervised by its own part editor(s) so that high-quality content as well as completeness are assured. The book provides essential scientific and technical information to researchers and engineers already working in the field as well as students and young scientists planning to work in the area in the future. Lasers found application in materials processing practically since their invention in 1960, and are currently used widely in manufacturing. The main driving force behind this fact is that the lasers can provide unique solutions in material processing with high quality, high efficiency, high flexibility, high resolution, versatility and low environmental load. Macro-processing based on thermal process using infrared lasers such as CO2 lasers has been the mainstream in the early stages, while research and development of micro- and nano-processing are becoming increasingly more active as short wavelength and/or short pulse width lasers have been developed. In particular, recent advances in ultrafast lasers have opened up a new avenue to laser material processing due to the capabilities of ultrahigh precision micro- and nanofabrication of diverse materials. This handbook is the first book covering the basics, the state-of-the-art and important applications of the dynamic and rapidly expanding discipline of laser micro- and nanoengineering. This comprehensive source makes readers familiar with a broad spectrum of approaches to solve all relevant problems in science and technology. This handbook is the ultimate desk reference for all people working in the field.
Note Includes index.
Access Note Access limited to authorized users.
Source of Description Description based on print version record.
Added Author Sugioka, Kōji, editor.
Available in Other Form Handbook of Laser Micro- and Nano-Engineering.
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Record Appears in Online Resources > Ebooks
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Intro
Foreword
Preface
Contents
About the Editor
Section Editors
Contributors
Part I: Fundamentals of Laser-Matter Interaction
1 Laser Coupling and Relaxation of the Absorbed Energy: Metals, Semiconductors, and Dielectrics
Introduction
Phenomenological Description of Ultrashort-Pulse Excitation
Light-Matter Interaction
Optical Excitation of Metals: The Need for Ultrashort Pulses
Optical Excitation of Band-Gap Materials: Linear Versus Nonlinear Absorption
Material Response
Electromagnetic Fields in Matter

Experimental Observables Related to Ablation
Scaling Laws
Part I: Diameter-Squared (D2) Plots
Scaling Laws
Part II: Depth Versus Fluence
Ultrashort-Pulse Excitation of Metals
The Two-Temperature Model
Thermophysical Material Parameters for Metals
Optical Material Parameters for Metals
Examples of Numerical-Modeling Results for Metals
Ablation Criterion for Metals
Analytical Models Revisited: A High-Fluence Scaling Law for Metals
Measuring Ablation Thresholds and Low-Fluence Behavior for Metals
Single- or Multi-Shot Irradiation: Incubation Effects in Metals

High-Fluence Ablation Rates for Metals
Nonthermal Ablation of Metals: Signatures of Mechanical Effects
Bandgap Materials
Semiconductors
Strong-Field Excitation: Keldysh ́Model
Excitation of Dielectric Materials: The MRE Model
Ablation Rates of Dielectrics
Experiments and Modeling
Incubation Effects in Dielectrics
Conclusion
Cross-References
References
2 Laser-Induced Non-thermal Processes
Introduction
Electron-Electron Scattering
Non-Thermal Melting
Hot Electron Pressure
Nonequilibrium Thermionic Emission
Emission into Fluids

Coulomb Explosion
Summary
References
3 Laser-Induced Thermal Processes: Heat Transfer, Generation of Stresses, Melting and Solidification, Vaporization, and Phase ...
Introduction
Laser Energy Deposition and Redistribution
Peculiarity of Energy Redistribution in Two-Temperature State
Contribution of Phonon Thermal Conductivity in Metals
Effect of Heat Transfer Dimensionality
Laser-Induced Stresses and Stress Waves
Generation of Laser Induced Stresses
Photomechanical Spallation
Stress Induced Generation of Crystal Defects

Acoustic Activation of Atomic Level Processes
Laser-Induced Melting and Resolidification
Mechanisms and Timescales of Melting
Heterogeneous Melting
Homogeneous Melting
Homogeneous Versus Heterogeneous Melting
Rapid Solidification and Implications on Surface Microstructure and Morphology
Liquid-Vapor Transformations
Normal Vaporization
Laser Interaction with the Laser Ablation Plume
Knudsen Layer
Back Flux to the Laser Vaporizing Surface
Normal Boiling
Phase Explosion or Explosive Boiling
Nanoparticle Formation by Pulsed Laser Ablation

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