@article{1442427,
      recid = {1442427},
      author = {Yang, Zhuoqing,},
      title = {Advanced MEMS/NEMS fabrication and sensors /},
      publisher = {Springer,},
      address = {Cham, Switzerland :},
      pages = {1 online resource},
      year = {2022},
      note = {Includes index.},
      abstract = {This book begins by introducing new and unique  fabrication, micromachining, and integration manufacturing  methods for MEMS (Micro-Electro-Mechanical Systems) and  NEMS (Nano-Electro-Mechanical Systems) devices, as well as  novel nanomaterials for sensor fabrications. The second  section focuses on novel sensors based on these emerging  MEMS/NEMS fabrication methods, and their related  applications in industrial, biomedical, and environmental  monitoring fields, which makes up the sensing layer (or  perception layer) in IoT architecture. This authoritative  guide offers graduate students, postgraduates, researchers,  and practicing engineers with state-of-the-art processes  and cutting-edge technologies on MEMS /NEMS, micro- and  nanomachining, and microsensors, addressing progress in the  field and prospects for future development. Presents latest  international research on MEMS/NEMS fabrication  technologies and novel micro/nano sensors; Covers a broad  spectrum of sensor applications; Written by leading experts  in the field.},
      url = {http://library.usi.edu/record/1442427},
      doi = {https://doi.org/10.1007/978-3-030-79749-2},
}