Micromachined circuits and devices : microwave to sub-millimeter applications / Shiban Kishen Koul, Sukomal Dey.
Koul, Shiban K., author.; Dey, Sukomal, author.
2022
TK7875
Available Online

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Title Micromachined circuits and devices : microwave to sub-millimeter applications / Shiban Kishen Koul, Sukomal Dey.
Author Koul, Shiban K., author.
ISBN 9789811694431 (electronic bk.)
9811694435 (electronic bk.)
9811694427
9789811694424
DOI https://doi.org/10.1007/978-981-16-9443-1
Published Singapore : Springer, 2022.
Language English
Description 1 online resource (xvi, 380 pages) : illustrations (some color)
Item Number 10.1007/978-981-16-9443-1 doi
Call Number TK7875
Dewey Decimal Classification 621.381
Summary This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency range. Wide varieties of micromachined switching networks starting from single-pole-double-throw (SPDT) to single-pole-fourteen-throw (SP14T) are discussed utilizing vertical and lateral actuation movements of the switch. Different transduction mechanisms of micromachined resonators are highlighted that includes capacitive, piezoelectric, and piezoresistive types. The book provides major design guidelines for the development of MEMS-based digital phase shifters, tunable filters, and antennas with extensive measurement data. Apart from the radio frequency (RF) requirements, an extensive guideline is given for the improvement of the reliability of micromachined switches and digital phase shifters where multiple switches are operating simultaneously. It takes multiple iterations and extensive characterizations to conclude with a reliable MEMS digital phase shifter, and these aspects are given one of the prime attentions in this book. Detailed performance analysis of metamaterial inspired MEMS switches is then discussed for application in millimeter wave frequency bands up to about 170 GHz. The book concludes with future research activities of RF MEMS technology and its potential in space, defense, sensors, and biomedical applications.
Bibliography, etc. Note Includes bibliographical references and index.
Access Note Access limited to authorized users.
Digital File Characteristics text file
PDF
Added Author Dey, Sukomal, author.
Series Lecture notes in electrical engineering ; v. 859. 1876-1119
Available in Other Form Print version: 9789811694424
Print version: 9789811694448
Print version: 9789811694455
Linked Resources Online Access
Record Appears in Online Resources > Ebooks
All Resources
Introduction to Radio Frequency Micro Electromechanical Systems
Micromachined Microwave Passive Circuits
Micromachined Single-Pole-Single-Throw Switches
Micromachined Single-Pole-Multi-Thru Switching Networks
Micromachined Resonators and Circuits
Micromachined Phase Shifters
Micromachined Tunable Filters using MEMS Switches
Reliability Analysis of RF MEMS Devices
Micromachined Antennas
Micromachined Metamaterial Inspired Switches
Future Scope of RF MEMS at THz Regime.

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