001444392 000__ 04257cam\a2200637\i\4500 001444392 001__ 1444392 001444392 003__ OCoLC 001444392 005__ 20230310003707.0 001444392 006__ m\\\\\o\\d\\\\\\\\ 001444392 007__ cr\un\nnnunnun 001444392 008__ 220207s2022\\\\si\a\\\\ob\\\\001\0\eng\d 001444392 019__ $$a1296085097$$a1296118060$$a1296427498$$a1298386918 001444392 020__ $$a9789811694431$$q(electronic bk.) 001444392 020__ $$a9811694435$$q(electronic bk.) 001444392 020__ $$z9811694427 001444392 020__ $$z9789811694424 001444392 0247_ $$a10.1007/978-981-16-9443-1$$2doi 001444392 035__ $$aSP(OCoLC)1296665860 001444392 040__ $$aDKU$$beng$$epn$$cDKU$$dEBLCP$$dYDX$$dGW5XE$$dOCLCO$$dOCLCF$$dOCLCQ$$dUKAHL$$dOCLCQ 001444392 049__ $$aISEA 001444392 050_4 $$aTK7875 001444392 08204 $$a621.381$$223 001444392 1001_ $$aKoul, Shiban K.,$$eauthor. 001444392 24510 $$aMicromachined circuits and devices :$$bmicrowave to sub-millimeter applications /$$cShiban Kishen Koul, Sukomal Dey. 001444392 264_1 $$aSingapore :$$bSpringer,$$c2022. 001444392 300__ $$a1 online resource (xvi, 380 pages) :$$billustrations (some color) 001444392 336__ $$atext$$btxt$$2rdacontent 001444392 337__ $$acomputer$$bc$$2rdamedia 001444392 338__ $$aonline resource$$bcr$$2rdacarrier 001444392 347__ $$atext file 001444392 347__ $$bPDF 001444392 4901_ $$aLecture notes in electrical engineering,$$x1876-1119 ;$$vv. 859 001444392 504__ $$aIncludes bibliographical references and index. 001444392 5050_ $$aIntroduction to Radio Frequency Micro Electromechanical Systems -- Micromachined Microwave Passive Circuits -- Micromachined Single-Pole-Single-Throw Switches -- Micromachined Single-Pole-Multi-Thru Switching Networks -- Micromachined Resonators and Circuits -- Micromachined Phase Shifters -- Micromachined Tunable Filters using MEMS Switches -- Reliability Analysis of RF MEMS Devices -- Micromachined Antennas -- Micromachined Metamaterial Inspired Switches -- Future Scope of RF MEMS at THz Regime. 001444392 506__ $$aAccess limited to authorized users. 001444392 520__ $$aThis book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency range. Wide varieties of micromachined switching networks starting from single-pole-double-throw (SPDT) to single-pole-fourteen-throw (SP14T) are discussed utilizing vertical and lateral actuation movements of the switch. Different transduction mechanisms of micromachined resonators are highlighted that includes capacitive, piezoelectric, and piezoresistive types. The book provides major design guidelines for the development of MEMS-based digital phase shifters, tunable filters, and antennas with extensive measurement data. Apart from the radio frequency (RF) requirements, an extensive guideline is given for the improvement of the reliability of micromachined switches and digital phase shifters where multiple switches are operating simultaneously. It takes multiple iterations and extensive characterizations to conclude with a reliable MEMS digital phase shifter, and these aspects are given one of the prime attentions in this book. Detailed performance analysis of metamaterial inspired MEMS switches is then discussed for application in millimeter wave frequency bands up to about 170 GHz. The book concludes with future research activities of RF MEMS technology and its potential in space, defense, sensors, and biomedical applications. 001444392 650_0 $$aMicroelectromechanical systems. 001444392 650_0 $$aMicromachining. 001444392 650_0 $$aNanoscience. 001444392 650_0 $$aMetamaterials. 001444392 650_6 $$aMicrosystèmes électromécaniques. 001444392 650_6 $$aMicro-usinage. 001444392 650_6 $$aNanosciences. 001444392 650_6 $$aMétamatériaux. 001444392 655_0 $$aElectronic books. 001444392 7001_ $$aDey, Sukomal,$$eauthor. 001444392 77608 $$iPrint version: $$z9789811694424 001444392 77608 $$iPrint version: $$z9789811694448 001444392 77608 $$iPrint version: $$z9789811694455 001444392 830_0 $$aLecture notes in electrical engineering ;$$vv. 859.$$x1876-1119 001444392 852__ $$bebk 001444392 85640 $$3Springer Nature$$uhttps://univsouthin.idm.oclc.org/login?url=https://link.springer.com/10.1007/978-981-16-9443-1$$zOnline Access$$91397441.1 001444392 909CO $$ooai:library.usi.edu:1444392$$pGLOBAL_SET 001444392 980__ $$aBIB 001444392 980__ $$aEBOOK 001444392 982__ $$aEbook 001444392 983__ $$aOnline 001444392 994__ $$a92$$bISE