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Table of Contents
Introduction to Radio Frequency Micro Electromechanical Systems
Micromachined Microwave Passive Circuits
Micromachined Single-Pole-Single-Throw Switches
Micromachined Single-Pole-Multi-Thru Switching Networks
Micromachined Resonators and Circuits
Micromachined Phase Shifters
Micromachined Tunable Filters using MEMS Switches
Reliability Analysis of RF MEMS Devices
Micromachined Antennas
Micromachined Metamaterial Inspired Switches
Future Scope of RF MEMS at THz Regime.
Micromachined Microwave Passive Circuits
Micromachined Single-Pole-Single-Throw Switches
Micromachined Single-Pole-Multi-Thru Switching Networks
Micromachined Resonators and Circuits
Micromachined Phase Shifters
Micromachined Tunable Filters using MEMS Switches
Reliability Analysis of RF MEMS Devices
Micromachined Antennas
Micromachined Metamaterial Inspired Switches
Future Scope of RF MEMS at THz Regime.