Low-energy ion irradiation of materials : fundamentals and application / Bernd Rauschenbach.
2022
TA418.6
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Details
Title
Low-energy ion irradiation of materials : fundamentals and application / Bernd Rauschenbach.
Author
Rauschenbach, Bernd, author.
ISBN
9783030972776 (electronic bk.)
3030972771 (electronic bk.)
9783030972769 (print)
3030972771 (electronic bk.)
9783030972769 (print)
Published
Cham, Switzerland : Springer, 2022.
Language
English
Description
1 online resource (xxiv, 752 pages) : illustrations (some color).
Item Number
10.1007/978-3-030-97277-6 doi
Call Number
TA418.6
Dewey Decimal Classification
620.1/1228
Summary
This book provides a comprehensive introduction to all aspects of low-energy ion-solid interaction from basic principles to advanced applications in materials science. It features a balanced and insightful approach to the fundamentals of the low-energy ion-solid surface interaction, focusing on relevant topics such as interaction potentials, kinetics of binary collisions, ion range, radiation damages, and sputtering. Additionally, the book incorporates key updates reflecting the latest relevant results of modern research on topics such as topography evolution and thin-film deposition under ion bombardment, ion beam figuring and smoothing, generation of nanostructures, and ion beam-controlled glancing angle deposition. Filling a gap of almost 20 years of relevant research activity, this book offers a wealth of information and up-to-date results for graduate students, academic researchers, and industrial scientists working in these areas.
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
Source of Description
Online resource; title from PDF title page (SpringerLink, viewed August 22, 2022).
Series
Springer series in materials science ; v. 324. 2196-2812
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Table of Contents
1. Introduction
2. Collision processes
3. Energy-loss processes and ion range
4. Ion beam induced damage
5. Sputtering
6. Evolution of topography under low-energy ion bombardment
7. Ion beam figuring and smoothing
8. Ion beam deposition
9. Ion beam assisted deposition
10. Ion beam sputtering induced glancing angle deposition. .
2. Collision processes
3. Energy-loss processes and ion range
4. Ion beam induced damage
5. Sputtering
6. Evolution of topography under low-energy ion bombardment
7. Ion beam figuring and smoothing
8. Ion beam deposition
9. Ion beam assisted deposition
10. Ion beam sputtering induced glancing angle deposition. .