Intro
Supervisor's Foreword
Acknowledgments
Contents
Parts of This Thesis Have Been Published in the Following Journal Articles
1 Introduction
1.1 Brief History of Semiconductors in Communication
1.2 Layout of this Dissertation
References
2 Polarization-Induced 2D Hole Gases in Undoped (In)GaN/AlN Heterostructures
2.1 Introduction
2.2 Polarization Charges in III-Nitride Heterostructures
2.3 The Undoped GaN/AlN 2DHG
2.4 Impurity Blocking Layers in the AlN Buffer Layer
2.5 Very High density InGaN/AlN 2DHGs
2.6 Conclusions
2.7 Future Directions

4.4.3 Shubhnikov-de-Haas Oscillations
4.5 Future Directions
References
5 AlN/GaN/AlN High Electron Mobility Transistors
5.1 Introduction
5.2 Thermal Advantage of AlN Buffer Layer
5.3 MBE-Grown AlN Buffer Layers on SiC for RF HEMTs
5.4 State-of-Art AlN/GaN/AlN HEMTs
5.5 In-situ AlN Passivation for Reduced Dispersion
5.5.1 GaN Channel Strain in AlN/GaN/AlN Heterostructures
5.5.2 2DEG Transport in In-situ Passivated AlN/GaN/AlN Heterostructures
5.5.3 Reduced Dispersion in AlN/GaN/AlN HEMTs
5.6 Enhancement-Mode AlN/GaN/AlN MOS-HEMTs with Ultra-Thin 3nm GaN Channels

5.7 Future Directions
References
6 Integrated RF Electronics on the AlN Platform
6.1 Introduction
6.2 Survey of GaN-Based CMOS-Logic Realizations
6.3 AlN-Based CMOS Realizations
6.4 In-situ Sublimation Etch of GaN
6.5 Passive RF Devices on AlN Platform
6.5.1 Epitaxial AlN Bulk Acoustic Waveguide Resonators
6.5.2 SiC Substrate Integrated Waveguides (SIW)
References
7 Epitaxial Growth of AlN-Based Heterostructures for Electronics
7.1 PA-MBE Growth of GaN/AlN 2DHGs
7.1.1 Detailed Growth Recipe
7.1.2 Variations in the 2DHG Active Region

7.1.3 Growth Condition Optimization Studies
Optimizing the GaN/AlN Interface
Large Area Growths
7.2 PA-MBE Growth of AlN/GaN/AlN 2DEGs
7.2.1 In-situ Cleaning of 6H-SiC
7.2.2 Detailed Growth Recipe
7.2.3 In-situ AlN passivated AlN/GaN/AlN HEMTs
References
8 Electronics on Single-Crystal, Bulk AlN Substrates
8.1 Single-Crystal AlN Substrates for Transistors
8.2 Early Results
References
A Author's Biographical Sketch