Front Matter
Introduction to the Basic Concepts
Brief Introduction of Theories
Early Radio Communication
Basic Knowledge of Electric Circuits (Circuits)
Further Discussion of Semiconductors and Diodes
Transistor and Integrated Circuit
The Development History of Semiconductor Industry
Semiconductor Photonic Devices
Semiconductor Light Detection and Photocell
Manufacture of Silicon Wafer
Basic Knowledges of Process
Photolithography (Lithography)
Dielectric Films Growth
Introduction of Etching and RIE System
Dry Etching
Metal Processes
Doping Processes
Process Control Monitor, Packaging, and the Others
Index