Atomlagenabscheidung von hafniumoxid / Thomas Zilbauer.
2010
TS695 .Z553 2010
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Details
Title
Atomlagenabscheidung von hafniumoxid / Thomas Zilbauer.
Author
Zilbauer, Thomas, author.
Edition
1. Auflage.
ISBN
9783869552705
9783736932708 (e-book)
9783736932708 (e-book)
Published
Gottingen, [Germany] : Cuvillier Verlag, 2010.
Copyright
2010
Language
German
Description
1 online resource (152 pages) : illustrations (some color).
Call Number
TS695 .Z553 2010
Dewey Decimal Classification
660.04
Bibliography, etc. Note
Includes bibliographical references.
Access Note
Access limited to authorized users.
Source of Description
Description based on online resource; title from PDF title page (ebrary, viewed October 6, 2017).
Available in Other Form
Atomlagenabscheidung von hafniumoxid.
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