Dual-mass linear vibration silicon-based MEMS gyroscope / Huiliang Cao.
Cao, Huiliang, author.
2023
TJ209
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Title Dual-mass linear vibration silicon-based MEMS gyroscope / Huiliang Cao.
Author Cao, Huiliang, author.
ISBN 9789811992476 (electronic bk.)
9811992479 (electronic bk.)
9811992460
9789811992469
DOI https://doi.org/10.1007/978-981-19-9247-6
Published Singapore : Springer ; [China] : National Defense Industry Press, [2023]
Copyright ©2023
Language English
Description 1 online resource (x, 224 pages) : illustrations (some color)
Item Number 10.1007/978-981-19-9247-6 doi
Call Number TJ209
Dewey Decimal Classification 681/.753
Summary This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
Bibliography, etc. Note Includes bibliographical references.
Access Note Access limited to authorized users.
Source of Description Description based on print version record.
Available in Other Form DUAL-MASS LINEAR VIBRATION SILICON-BASED MEMS GYROSCOPE.
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Chapter 1 Introduction
Chapter 2 Silicon-based MEMS gyroscope structure and working principle
Chapter 3 Silicon-based MEMS gyroscope structure noise analysis and system model
Chapter 4 Silicon-based MEMS gyroscope quadrature error correction technology and optimization
Chapter 5 Silicon-based MEMS gyroscope sense closed loop and frequency tuning technology
Chapter 6 Temperature influence on MEMS gyroscope and suppression method
Chapter 7 Silicon-based MEMS gyroscope monitoring circuit design and test technology
References.

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