001463555 000__ 03638cam\a2200613\i\4500
001463555 001__ 1463555
001463555 003__ OCoLC
001463555 005__ 20230601003326.0
001463555 006__ m\\\\\o\\d\\\\\\\\
001463555 007__ cr\cn\nnnunnun
001463555 008__ 230427s2023\\\\si\a\\\\ob\\\\000\0\eng\d
001463555 019__ $$a1376980306$$a1379711928
001463555 020__ $$a9789811992476$$q(electronic bk.)
001463555 020__ $$a9811992479$$q(electronic bk.)
001463555 020__ $$z9811992460
001463555 020__ $$z9789811992469
001463555 0247_ $$a10.1007/978-981-19-9247-6$$2doi
001463555 035__ $$aSP(OCoLC)1377663522
001463555 040__ $$aGW5XE$$beng$$erda$$epn$$cGW5XE$$dYDX$$dN$T
001463555 049__ $$aISEA
001463555 050_4 $$aTJ209
001463555 08204 $$a681/.753$$223/eng/20230427
001463555 1001_ $$aCao, Huiliang,$$eauthor.
001463555 24510 $$aDual-mass linear vibration silicon-based MEMS gyroscope /$$cHuiliang Cao.
001463555 264_1 $$aSingapore :$$bSpringer ;$$a[China] :$$bNational Defense Industry Press,$$c[2023]
001463555 264_4 $$c©2023
001463555 300__ $$a1 online resource (x, 224 pages) :$$billustrations (some color)
001463555 336__ $$atext$$btxt$$2rdacontent
001463555 337__ $$acomputer$$bc$$2rdamedia
001463555 338__ $$aonline resource$$bcr$$2rdacarrier
001463555 504__ $$aIncludes bibliographical references.
001463555 5050_ $$aChapter 1 Introduction -- Chapter 2 Silicon-based MEMS gyroscope structure and working principle -- Chapter 3 Silicon-based MEMS gyroscope structure noise analysis and system model -- Chapter 4 Silicon-based MEMS gyroscope quadrature error correction technology and optimization -- Chapter 5 Silicon-based MEMS gyroscope sense closed loop and frequency tuning technology -- Chapter 6 Temperature influence on MEMS gyroscope and suppression method -- Chapter 7 Silicon-based MEMS gyroscope monitoring circuit design and test technology -- References.
001463555 506__ $$aAccess limited to authorized users.
001463555 520__ $$aThis book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
001463555 588__ $$aDescription based on print version record.
001463555 650_0 $$aGyroscopes.
001463555 650_0 $$aMicroelectromechanical systems.
001463555 650_0 $$aSilicon$$xIndustrial applications.
001463555 655_0 $$aElectronic books.
001463555 77608 $$iPrint version:$$aCAO, HUILIANG.$$tDUAL-MASS LINEAR VIBRATION SILICON-BASED MEMS GYROSCOPE.$$d[Place of publication not identified] : SPRINGER VERLAG, SINGAPOR, 2023$$z9811992460$$w(OCoLC)1355195835
001463555 852__ $$bebk
001463555 85640 $$3Springer Nature$$uhttps://univsouthin.idm.oclc.org/login?url=https://link.springer.com/10.1007/978-981-19-9247-6$$zOnline Access$$91397441.1
001463555 909CO $$ooai:library.usi.edu:1463555$$pGLOBAL_SET
001463555 980__ $$aBIB
001463555 980__ $$aEBOOK
001463555 982__ $$aEbook
001463555 983__ $$aOnline
001463555 994__ $$a92$$bISE