Intro
Preface
Contents
About the Editors
Part I Fabrication of Micro/Nano Structures via Precision Mechanical Machining
1 Introduction to Precision Machining Micro/Nano Structures
1 Micro/Nano Structures Fabrication Methods
2 Principal Cutting Movement in Micro/Nano Structures Machining
3 Asistted Cutting Movement in Micro/Nano Structures Machining
4 Summary and Outlook
References
2 Tool Offset Flycutting Straight-Groove-Type Microstructures
1 Introduction
2 Machining System
2.1 The OTSEF System
2.2 Tool Path Planning
2.3 Mathematical Modeling

3 Experiments and Results Analysis
3.1 Experiment Setup
3.2 Results and Discussion
4 Conclusions
References
3 Tool Offset Flycutting Multi-layer Hierarchical Microstructures
1 Introduction
2 Fabrication of HMs Using OTSEF System Integrating STS
2.1 Tool Path Modeling for Micro-lens Unit Machining
2.2 Tool Path Modeling for Micro-lens Array Machining
2.3 Fabrication of Micro-lens Unit and Array
2.4 Tool Path Planning and Fabrication of MLU-SPM
2.5 Machining Error Compensation and Analysis
2.6 Fabrication of L-1SPM and L-2SPM

3 Fabrication of HMs Using the OTSEF System Integrating FTS
3.1 Tool Path Modeling for Micro-lens Array Machining
3.2 Simulation and Prediction of Path Planning
3.3 Fabrication of Micro-lens Array
3.4 Fabrication of Microstructures Using Sinusoidal Excitation
3.5 Fabrication of Multi-scale Microstructure
4 Conclusions
References
4 Tool Offset Flycutting Micro-optics Arrays with High-Aspect-Ratio
1 Introduction
2 Rules for Flexible MOAs Creation
3 The Assurance of OTS Cutting Tool Track
3.1 Athletics of the OTS
3.2 Determining the Cutting Tool Track

3.3 Features of the Cutting Tool Track
4 Experimental Setup
5 Results and Discussion
5.1 Miniature Spherical Arrays
5.2 Miniature Free-Form Lenticles Array
6 Conclusions
References
5 Diamond Milling System for Fabricating Infrared Micro-optics Arrays
1 Introduction
2 Processing Principle for Self-tuned Diamond Milling
3 Toolpath Decision for STDM
3.1 Toolpath Programming Algorithm
3.2 Characteristics of the Toolpath
4 Growth of STDM System and Experimental Setup
5 Results and Discussion
6 STDM for Sinusoidal Microgrooves

6.1 Simulation of STDM for Sinusoidal Microgrooves
6.2 Results and Discussion of STDM for Sinusoidal Microgrooves
7 Conclusions
References
6 Cutting Force and Energy Modelling in Ultra-Precision Machining of Micro-structures
1 Introduction
2 Evaluation of Cutting Forces for Fabricating Microgrooves
2.1 Theoretical Models for Prediction of Cutting Forces
2.2 Materials and Experimental Procedures
2.3 Serrated Chip Formation and Cutting Temperature Evolution
2.4 Cutting Force Validation
2.5 Spring Back Force Analyses