Nanoscale Standards by Metrological AFM and Other Instruments.
2021
TA418.9.N35
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Details
Title
Nanoscale Standards by Metrological AFM and Other Instruments.
Author
Edition
1st ed.
ISBN
9780750344364
9780750331920
9780750331920
Published
Bristol : Institute of Physics Publishing, 2021.
Copyright
©2021.
Language
English
Description
1 online resource (91 pages).
Call Number
TA418.9.N35
Dewey Decimal Classification
620.5
Summary
This book reviews nanometrological standards before proceeding to detail pitch, step height, line width, nanoparticle size, and surface roughness. Essential for users making quantitative nanoscale measurements, in a commercial or academic research setting, or involved in engineering nanometrology for quality control in industrial applications.
Access Note
Access limited to authorized users.
Source of Description
Description based on publisher supplied metadata and other sources.
Series
IOP Ebooks Series
Available in Other Form
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