TY  - GEN
T1  - FBAR, MEMS and NEMS resonator design and applications
DA  - c2010.
CY  - Boston :
AU  - Campanella, Humberto.
CN  - Proquest Ebook Central Academic Complete
CN  - TK5981
PB  - Artech House,
PP  - Boston :
PY  - c2010.
N1  - Includes index.
ID  - 367880
KW  - Acoustic surface wave devices.
KW  - Electric resonators.
TI  - FBAR, MEMS and NEMS resonator design and applications
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10393281
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10393281
ER  -