TY  - GEN
AU  - González-Elipe, A. R.
AU  - Yubero, F.
AU  - Sanz, J. M.
CN  - Ebrary Academic Complete
CN  - QC176.84.R3
CY  - London :
CY  - Singapore ;
CY  - River Edge, NJ :
DA  - c2003.
ID  - 377980
KW  - Thin films
KW  - Thin films
KW  - Ion bombardment.
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10255526
PB  - Imperial College Press ;
PB  - Distributed by World Scientific,
PP  - London :
PP  - Singapore ;
PP  - River Edge, NJ :
PY  - c2003.
T1  - Low energy ion assisted film growth
TI  - Low energy ion assisted film growth
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10255526
ER  -