@article{391991,
      recid = {391991},
      author = {Chen, Francis F.,},
      title = {Plasma processing and processing science [electronic  resource] /},
      publisher = {National Academy Press,},
      address = {Washington, D.C. :},
      pages = {x, 35 p.},
      year = {1995},
      note = {Committee chair:  Francis F. Chen.},
      url = {http://library.usi.edu/record/391991},
}