Microelectromechanical systems [electronic resource] : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
1997
TK7874 .N333 1997eb
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Title
Microelectromechanical systems [electronic resource] : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
Corporate Author
ISBN
0585002509 (electronic bk.)
Publication Details
Washington, DC : National Academy Press, 1997.
Language
English
Description
xiv, 61 p. : ill.
Call Number
TK7874 .N333 1997eb
Dewey Decimal Classification
621.381
Bibliography, etc. Note
Includes bibliographical references (p. 51-55).
Access Note
Access limited to authorized users.
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