@article{417886,
      recid = {417886},
      author = {Mack, Chris A.},
      title = {Fundamental principles of optical lithography the science  of microfabrication / [electronic resource] :},
      publisher = {Wiley,},
      address = {Chichester, West Sussex, England ;},
      pages = {xvii, 515 p. :},
      year = {2007},
      url = {http://library.usi.edu/record/417886},
}