TY  - GEN
AU  - Mack, Chris A.
CN  - TK7874
CY  - Chichester, West Sussex, England ;
CY  - Hoboken, NJ, USA :
DA  - c2007.
ID  - 417886
KW  - Integrated circuits
KW  - Microlithography
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10300846
PB  - Wiley,
PP  - Chichester, West Sussex, England ;
PP  - Hoboken, NJ, USA :
PY  - c2007.
T1  - Fundamental principles of optical lithographythe science of microfabrication /
TI  - Fundamental principles of optical lithographythe science of microfabrication /
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10300846
ER  -