000417886 000__ 01365cam\a2200373\a\4500
000417886 001__ 417886
000417886 005__ 20210513144712.0
000417886 006__ m\\\\\\\\u\\\\\\\\
000417886 007__ cr\cn|||||||||
000417886 008__ 071026s2007\\\\enka\\\\sb\\\\001\0\eng\\
000417886 010__ $$z  2007044548
000417886 015__ $$aGBA791483$$2bnb
000417886 0167_ $$z014276990$$2Uk
000417886 020__ $$z9780470018934
000417886 020__ $$z0470018933
000417886 020__ $$z9780470727300 (pbk.)
000417886 020__ $$z0470727306 (pbk.)
000417886 035__ $$a(CaPaEBR)ebr10300846
000417886 035__ $$a(OCoLC)647782698
000417886 040__ $$aCaPaEBR$$cCaPaEBR
000417886 05014 $$aTK7874$$b.M196 2007eb
000417886 08204 $$a621.3815/31$$222
000417886 1001_ $$aMack, Chris A.
000417886 24510 $$aFundamental principles of optical lithography$$h[electronic resource] :$$bthe science of microfabrication /$$cChris Mack.
000417886 260__ $$aChichester, West Sussex, England ;$$aHoboken, NJ, USA :$$bWiley,$$cc2007.
000417886 300__ $$axvii, 515 p. :$$bill. ;$$c25 cm.
000417886 504__ $$aIncludes bibliographical references and index.
000417886 506__ $$aAccess limited to authorized users.
000417886 650_0 $$aIntegrated circuits$$xDesign and construction.
000417886 650_0 $$aMicrolithography$$xIndustrial applications.
000417886 655_7 $$aElectronic books.$$2lcsh
000417886 852__ $$bebk
000417886 85640 $$3ProQuest Ebook Central Academic Complete$$uhttps://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10300846$$zOnline Access
000417886 909CO $$ooai:library.usi.edu:417886$$pGLOBAL_SET
000417886 980__ $$aEBOOK
000417886 980__ $$aBIB
000417886 982__ $$aEbook
000417886 983__ $$aOnline