TY  - GEN
CN  - TK7871.85
CY  - Washington, D.C. :
DA  - 1996.
ID  - 419596
KW  - Semiconductors
KW  - Plasma engineering
KW  - Plasma engineering
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10056959
PB  - National Academy Press,
PP  - Washington, D.C. :
PY  - 1996.
T1  - Database needs for modeling and simulation of plasma processing
TI  - Database needs for modeling and simulation of plasma processing
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10056959
ER  -