@article{440747,
      recid = {440747},
      author = {Ma, Xu, and Arce, Gonzalo R.},
      title = {Computational lithography [electronic resource] /},
      publisher = {Wiley-Blackwell,},
      address = {Oxford :},
      pages = {1 online resource (xv, 226 p.) :},
      year = {2010},
      url = {http://library.usi.edu/record/440747},
}