TY  - GEN
AU  - Ma, Xu,
AU  - Arce, Gonzalo R.
CN  - Proquest Ebook Central Academic Complete
CN  - TK7872.M3
CY  - Oxford :
DA  - 2010.
ID  - 440747
KW  - Microlithography
KW  - Integrated circuits
KW  - Photolithography
KW  - Semiconductors
KW  - Resolution (Optics)
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10419114
PB  - Wiley-Blackwell,
PP  - Oxford :
PY  - 2010.
T1  - Computational lithography
TI  - Computational lithography
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10419114
ER  -