@article{440811,
      note = {Includes index.},
      author = {Franssila, Sami.},
      url = {http://library.usi.edu/record/440811},
      title = {Introduction to microfabrication [electronic resource] /},
      publisher = {John Wiley & Sons,},
      recid = {440811},
      pages = {1 online resource (xiv, 518 p.) :},
      address = {Chichester, West Sussex, England ;},
      year = {2010},
}