TY  - GEN
T1  - Introduction to microfabrication
DA  - 2010.
CY  - Chichester, West Sussex, England ;
CY  - Hoboken, NJ :
AU  - Franssila, Sami.
ET  - 2nd ed.
CN  - Proquest Ebook Central Academic Complete
CN  - TK7875
PB  - John Wiley & Sons,
PP  - Chichester, West Sussex, England ;
PP  - Hoboken, NJ :
PY  - 2010.
N1  - Includes index.
ID  - 440811
KW  - Microelectromechanical systems.
KW  - Electronic apparatus and appliances.
KW  - Microfabrication.
TI  - Introduction to microfabrication
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10419414
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10419414
ER  -