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000440811 010__ $$z  2010010076
000440811 020__ $$z9780470749838 (cloth)
000440811 035__ $$a(CaPaEBR)ebr10419414
000440811 035__ $$a(OCoLC)694142843
000440811 040__ $$aCaPaEBR$$cCaPaEBR
000440811 05014 $$aTK7875$$b.F73 2010eb
000440811 08204 $$a621.381$$222
000440811 1001_ $$aFranssila, Sami.
000440811 24510 $$aIntroduction to microfabrication$$h[electronic resource] /$$cSami Franssila.
000440811 250__ $$a2nd ed.
000440811 260__ $$aChichester, West Sussex, England ;$$aHoboken, NJ :$$bJohn Wiley & Sons,$$c2010.
000440811 300__ $$a1 online resource (xiv, 518 p.) :$$bill.
000440811 500__ $$aIncludes index.
000440811 506__ $$aAccess limited to authorized users.
000440811 650_0 $$aMicroelectromechanical systems.
000440811 650_0 $$aElectronic apparatus and appliances.
000440811 650_0 $$aMicrofabrication.
000440811 85280 $$bebk$$hProquest Ebook Central Academic Complete
000440811 85640 $$3ProQuest Ebook Central Academic Complete$$uhttps://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10419414$$zOnline Access
000440811 909CO $$ooai:library.usi.edu:440811$$pGLOBAL_SET
000440811 980__ $$aEBOOK
000440811 980__ $$aBIB
000440811 982__ $$aEbook
000440811 983__ $$aOnline