@article{447564,
      author = {Ohring, Milton,},
      url = {http://library.usi.edu/record/447564},
      title = {Materials science of thin films deposition and structure /  [electronic resource] :},
      publisher = {Academic Press,},
      recid = {447564},
      pages = {xxi, 794 p. :},
      address = {San Diego, CA :},
      year = {2002},
}