TY - GEN T1 - Materials science of thin filmsdeposition and structure / DA - 2002. CY - San Diego, CA : AU - Ohring, Milton, ET - 2nd ed. CN - TA418.9.T45 PB - Academic Press, PP - San Diego, CA : PY - 2002. ID - 447564 KW - Thin films. TI - Materials science of thin filmsdeposition and structure / LK - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10172820 UR - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10172820 ER -