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000447564 010__ $$z  2001089414
000447564 020__ $$z0125249756 (alk. paper)
000447564 035__ $$a(CaPaEBR)ebr10172820
000447564 035__ $$a(OCoLC)648219703
000447564 040__ $$aCaPaEBR$$cCaPaEBR
000447564 05014 $$aTA418.9.T45$$bO47 2002eb
000447564 08204 $$a621.3815/2$$222
000447564 1001_ $$aOhring, Milton,$$d1936-
000447564 24510 $$aMaterials science of thin films$$h[electronic resource] :$$bdeposition and structure /$$cMilton Ohring.
000447564 250__ $$a2nd ed.
000447564 260__ $$aSan Diego, CA :$$bAcademic Press,$$c2002.
000447564 300__ $$axxi, 794 p. :$$bill. ;$$c24 cm.
000447564 504__ $$aIncludes bibliographical references and index.
000447564 506__ $$aAccess limited to authorized users.
000447564 650_0 $$aThin films.
000447564 655_7 $$aElectronic books.$$2lcsh
000447564 852__ $$bebk
000447564 85640 $$3ProQuest Ebook Central Academic Complete$$uhttps://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10172820$$zOnline Access
000447564 909CO $$ooai:library.usi.edu:447564$$pGLOBAL_SET
000447564 980__ $$aEBOOK
000447564 980__ $$aBIB
000447564 982__ $$aEbook
000447564 983__ $$aOnline