Silicon science and advanced micro-device engineering II [electronic resource] : selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan / edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura.
2012
TK7871.15.S55 H36 2010eb
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Title
Silicon science and advanced micro-device engineering II [electronic resource] : selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan / edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura.
ISBN
9783037852859
9783038136828 (e-book)
9783038136828 (e-book)
Publication Details
Durnten-Zurich : Trans Tech Publications, 2012.
Language
English
Description
311 p. : ill. (some col.).
Call Number
TK7871.15.S55 H36 2010eb
Bibliography, etc. Note
Includes bibliographical references and indexes.
Access Note
Access limited to authorized users.
Added Author
Added Meeting Name
Series
Key engineering materials, 1662-9809 ; v. 497
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