Silicon science and advanced micro-device engineering I [electronic resource] : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / edited by Osamu Hanaizumi and Masafumi Unno.
International Symposium on Silicon Science (5th : 2009 : Kiryū-shi, Japan); Hanaizumi, Osamu.; Unno, Masafumi.; Gunma Daigaku. International Education and Research Center for Silicon Science.; Gunma Daigaku. Advanced Technology Research Center.; International Conference on Advanced Micro-Device Engineering (1st : 2009 : Kiryū-shi, Japan)
2011
TK7871.15.S55 I585 2009eb
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Title
Silicon science and advanced micro-device engineering I [electronic resource] : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / edited by Osamu Hanaizumi and Masafumi Unno.
Other Title
ISSS 2009
ISBN
9780878492176 (pbk.)
0878492178 (pbk.)
9780878492176
9783038134817 (e-book)
0878492178 (pbk.)
9780878492176
9783038134817 (e-book)
Publication Details
Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, 2011.
Language
English
Description
xii, 282 p. : ill.
Call Number
TK7871.15.S55 I585 2009eb
Dewey Decimal Classification
621.381
Bibliography, etc. Note
Includes bibliographical references and indexes.
Access Note
Access limited to authorized users.
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Series
Key engineering materials, 1013-9826 ; v. 459
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