@article{460828,
      recid = {460828},
      author = {Hanaizumi, Osamu. and Unno, Masafumi.},
      title = {Silicon science and advanced micro-device engineering I  selected, peer reviewed papers from the 5th International  Symposium on Silicon Science and the 1st International  Conference on Advanced Micro-Device Engineering (ISSS &  AMDE 2009), was held by the International Education and  Research Center for Silicon Science and the Advanced  Technology Research Center (ATEC), Gunma University on 10  and 11 December 2009 in Kiryu, Japan / [electronic  resource] :. International Symposium on Silicon Science},
      publisher = {Trans Tech Publications,},
      address = {Stafa-Zurich ;},
      pages = {xii, 282 p. :},
      year = {2011},
      url = {http://library.usi.edu/record/460828},
}