TY  - GEN
AU  - Hanaizumi, Osamu.
AU  - Unno, Masafumi.
CN  - TK7871.15.S55
CY  - Stafa-Zurich ;
CY  - Enfield, N.H. :
DA  - 2011.
ID  - 460828
KW  - Silicon
KW  - Nanostructures
KW  - Microelectronics
LK  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10604228
PB  - Trans Tech Publications,
PP  - Stafa-Zurich ;
PP  - Enfield, N.H. :
PY  - 2011.
T1  - Silicon science and advanced micro-device engineering Iselected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /
TI  - Silicon science and advanced micro-device engineering Iselected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /
UR  - https://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10604228
ER  -