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000460828 010__ $$z  2012405162
000460828 020__ $$z9780878492176 (pbk.)
000460828 020__ $$z0878492178 (pbk.)
000460828 020__ $$z9780878492176
000460828 020__ $$z9783038134817 (e-book)
000460828 035__ $$a(CaPaEBR)ebr10604228
000460828 035__ $$a(OCoLC)815479009
000460828 040__ $$aCaPaEBR$$cCaPaEBR
000460828 05014 $$aTK7871.15.S55$$bI585 2009eb
000460828 08204 $$a621.381$$223
000460828 1112_ $$aInternational Symposium on Silicon Science$$n(5th :$$d2009 :$$cKiryū-shi, Japan)
000460828 24510 $$aSilicon science and advanced micro-device engineering I$$h[electronic resource] :$$bselected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /$$cedited by Osamu Hanaizumi and Masafumi Unno.
000460828 24630 $$a5th International Symposium on Silicon Science
000460828 2463_ $$aFifth International Symposium on Silicon Science
000460828 24630 $$aInternational Symposium on Silicon Science
000460828 24630 $$a1st International Conference on Advanced Micro-Device Engineering
000460828 2463_ $$aFirst International Conference on Advanced Micro-Device Engineering
000460828 24630 $$aInternational Conference on Advanced Micro-Device Engineering
000460828 24630 $$aISSS & AMDE 2009
000460828 24613 $$aISSS 2009
000460828 24630 $$aAMDE 2009
000460828 260__ $$aStafa-Zurich ;$$aEnfield, N.H. :$$bTrans Tech Publications,$$c2011.
000460828 300__ $$axii, 282 p. :$$bill.
000460828 440_0 $$aKey engineering materials,$$x1013-9826 ;$$vv. 459
000460828 504__ $$aIncludes bibliographical references and indexes.
000460828 506__ $$aAccess limited to authorized users.
000460828 650_0 $$aSilicon$$vCongresses.
000460828 650_0 $$aNanostructures$$vCongresses.
000460828 650_0 $$aMicroelectronics$$vCongresses.
000460828 655_7 $$aElectronic books.$$2lcsh
000460828 7001_ $$aHanaizumi, Osamu.
000460828 7001_ $$aUnno, Masafumi.
000460828 7102_ $$aGunma Daigaku.$$bInternational Education and Research Center for Silicon Science.
000460828 7102_ $$aGunma Daigaku.$$bAdvanced Technology Research Center.
000460828 7112_ $$aInternational Conference on Advanced Micro-Device Engineering$$n(1st :$$d2009 :$$cKiryū-shi, Japan)
000460828 852__ $$bebk
000460828 85640 $$3ProQuest Ebook Central Academic Complete$$uhttps://univsouthin.idm.oclc.org/login?url=http://site.ebrary.com/lib/usiricelib/Doc?id=10604228$$zOnline Access
000460828 909CO $$ooai:library.usi.edu:460828$$pGLOBAL_SET
000460828 980__ $$aEBOOK
000460828 980__ $$aBIB
000460828 982__ $$aEbook
000460828 983__ $$aOnline