@article{464842,
      author = {Wong, Terence K. S.},
      url = {http://library.usi.edu/record/464842},
      title = {Semiconductor strain metrology principles and applications  / [electronic resource] :},
      publisher = {Bentham Science,},
      recid = {464842},
      pages = {136 p. :},
      address = {[Saif Zone, Sharjah, U.A.E] ;},
      year = {2012},
}