Micro electro mechanical systems (MEMS) [electronic resource] : technology, fabrication processes and applications / Britt Ekwall and Mikkel Cronquist, editors.
2010
TK7875 .M5284 2010eb
Formats
| Format | |
|---|---|
| BibTeX | |
| MARCXML | |
| TextMARC | |
| MARC | |
| DublinCore | |
| EndNote | |
| NLM | |
| RefWorks | |
| RIS |
Linked e-resources
Linked Resource
Details
Title
Micro electro mechanical systems (MEMS) [electronic resource] : technology, fabrication processes and applications / Britt Ekwall and Mikkel Cronquist, editors.
ISBN
9781608764747 (hardcover : alk. paper)
9781613246986 (e-book)
9781613246986 (e-book)
Publication Details
Hauppauge, N.Y. : Nova Science Publishers, c2010.
Language
English
Description
xii, 391 p. : ill. (some col.).
Call Number
TK7875 .M5284 2010eb
Dewey Decimal Classification
621
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
Added Author
Series
Nanotechnology science and technology series.
Linked Resources
Record Appears in