Reliability of MEMS [electronic resource] : testing of materials and devices / edited by Osamu Tabata, Toshiyuki Tsuchiya.
2013
TK7875 .R45 2013eb
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Details
Title
Reliability of MEMS [electronic resource] : testing of materials and devices / edited by Osamu Tabata, Toshiyuki Tsuchiya.
ISBN
9783527335015
Publication Details
Weinheim : Wiley-VCH, 2013.
Language
English
Description
xx, 303 p. : ill.
Call Number
TK7875 .R45 2013eb
Dewey Decimal Classification
539.60113
Note
First edition 2007.
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
Added Author
Series
Advanced micro & nanosystems.
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