Atomic layer deposition [electronic resource] : principles, characteristics, and nanotechnology applications / Tommi Kaariainen ... [et al.].
2013
TS695 .K33 2013eb
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Title
Atomic layer deposition [electronic resource] : principles, characteristics, and nanotechnology applications / Tommi Kaariainen ... [et al.].
Author
Kaariainen, Tommi.
Edition
2nd ed.
ISBN
9781118062777 (cloth : alk. paper)
9781118747421 (ebook)
9781118747421 (ebook)
Publication Details
Hoboken, NJ : John Wiley & Sons, c2013.
Language
English
Description
xv, 253 p. : ill.
Call Number
TS695 .K33 2013eb
Dewey Decimal Classification
620/.5
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
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